Mass production plasma cleaning device (large plasma cleaner)
Supports automated mass production lines. Inline type, sheet type, and various types with flexible hardware configurations, all with a proven track record of high effectiveness of vacuum plasma in mass production lines.
Expanding a chamber configuration with a proven track record in advanced thin film devices for cleaning applications. Achieving high cleaning effectiveness across various substrates. Flexible hardware configuration and high process capability tailored to the substrate and production volume. Supporting cleaning, descumming, ashing, hydrophilic treatment, hydrophobic film treatment, and various other applications. A large plasma device with extensive experience from substrate mounting to material surface treatment.
- 企業：神港精機 東京支店
- 価格：Other
